Well-Proven, Industry Standard Materials Science, Inc. SunSource GEN II™ Magnetron Sputtering Sources in a variety of rectangular configurations. 

The industry standard for reactively sputtered and ion-assisted optical coating.  The SunSource Modeler™ Monte Carlo Thin Film Distribution Modeling Program for Round Sputtering Sources is also available Here

Low cost, highly flexible sources intended for the researcher with a multiplicity of applications to address.  Multiple feedthrough, mounting flange, tilt angle and positioning possibilities.  Argon and reactive gas through the cathode body, making it ideal for reactive and low pressure operation.

SunSource GEN II™ sputtering sources are engineered to deliver high target utilization, stable plasma behavior, and consistent thin-film performance across a wide range of operating conditions.

SunSource GEN II™ sputtering sources are designed for high target utilization and controlled plasma behavior in narrow-width coating applications. Discover the 90 mm lineup.

The Ion™ Series DC Magnetron Power Supply supports sputtering and substrate bias applications with stable operation across a 0–1000 V range and down to 20 watts for non-reactive processes.

One of a series of practical innovations that save money and increase productivity, the Kamlok™ Fast Target Exchange System is designed to reduce downtime, simplify service, and eliminate the fastener-related issues common in conventional target clamp designs.

The Polaris™ 300/600 packages deliver high-performance RF sputtering with flexible source configurations, automatic or manual impedance matching, and optional RS-232 communication or common exciter support for multi-source systems.

From legacy options to power supply bundles, everything you need to keep your systems operating efficiently.

We provide replacement and upgrade solutions designed to improve performance, reliability, serviceability, and long-term operating costs.

Field-proven components built for demanding sputtering and vacuum environments, helping reduce service issues, improve reliability, and eliminate the need to engineer custom solutions from scratch.